Basa reBrown Fused Alumina Micropowder rekugadzira nemazvo muindasitiri yeSemiconductor
Shamwari, nhasi tichataura nezvechimwe chinhu chakaoma uye chisinganyanyi kukosha—upfu hwebrown hwakasanganiswa hwealumina micropowder. Ungave usina kumbonzwa nezvazvo, asi machipisi akakosha uye akapfava mufoni yako newachi yako, asati atombogadzirwa, angangodaro akambozvigadzirisa. Kuzviti "mukuru wevagadziri vemachipisi" hakusi kuwedzeredza.
Usazvifungidzira sechishandiso chisina kusimba sedombo remugero. Munyika yemasemiconductors, inoita basa rakapfava semuvezi wemifananidzo midiki uchishandisa scalpels dzemhando yepamusoro.
I. "Kugadzira Chiso" cheChip: Sei Kukuya Kuchidikanwa?
Ngatitangei tanzwisisa chinhu chimwe chete: machipisi haakure zvakananga pasi rakati sandara. "Akavakwa" jira nejira pawafer yesilicon yakachena kwazvo, yakati sandara (yatinodaidza kuti "wafer"), sekuvaka chivako. "Chivako" ichi chine makamuri akawanda, uye denderedzwa remachira pauriri hwega hwega rakatetepa kupfuura chiuru chimwe chete pakukora kwebvudzi remunhu.
Saka heino dambudziko: kana uri kuvaka pasi idzva, kana nheyo—pamusoro pepasi rekare—isina kuenzana zvishoma, kunyangwe paine kubuda kudiki seatomu, zvinogona kukonzera kuti chivako chose chive chakakombama, chisina kutenderera zvakanaka, uye zvichiita kuti machipisi asashande. Kurasikirwa kwacho hakusi kutamba.
Saka, mushure mekunge pasi rega rega rapera, tinofanira kuita "kuchenesa" uye "kuenzanisa." Maitiro aya ane zita rakanaka: "Chemical Mechanical Planarization," rakapfupikiswa seCMP. Kunyange zvazvo zita racho richinzwika rakaoma, musimboti wacho hauna kuoma kunzwisisa: musanganiswa we chemical corrosion uye mechanical abrasion.
"Kupwanya" kwemakemikari kunoshandisa mvura yekupukuta yakakosha kupfavisa nekubvisa chinhu chinofanira kubviswa, zvichiita kuti chive "chinyoro" zvakanyanya.
"Kurova" kwemuchina kunotanga kushanda—hupfu hwebrown corundum micropowderBasa rayo nderekushandisa nzira dzemuviri kuti "ibvise" zvinhu zvakanyoroveswa nemazvo uye zvakaenzana nemaitiro emakemikari.
Ungabvunza kuti, nemidziyo yakawanda yekukwesha iripo, sei iyi iri chaiyo? Ndipo panobva hunhu hwayo hunoshamisa.
II. "Upfu hweMicronized Usina Micronized Zvakanyanya": Unyanzvi Hwakasarudzika hweBrown Fused Alumina
Muindasitiri ye semiconductor, upfu hwebrown fused alumina micronized hunoshandiswa hausi chinhu chinowanzoitika. Iyuniti ye "special forces", yakasarudzwa zvakanaka uye yakanatswa.
Kutanga, zvakaoma zvakakwana, asi kwete kushaya hanya.Alumina yakasanganiswa yebrownKuomarara kwedhaimani kwakafanana nedhaimani, kwakatokwana kubata zvinhu zvinoshandiswa nemachipisi zvakaita sesilicon, silicon dioxide, uye tungsten. Asi chinhu chikuru ndechekuti kuomarara kwayo kuomarara "kwakaoma". Kusiyana nezvimwe zvinhu zvakaoma (senge dhaimani) zvinopwanyika uye zvinotyoka nyore nyore kana zvamanikidzwa, alumina yakasanganiswa nebrown inoramba yakasimba uku ichichengetedza simba rekucheka, ichidzivirira kuva "chinhu chinoparadza."
Chechipiri, saizi yayo diki yezvidimbu inoita kuti icheke zvakaenzana. Iyi ndiyo pfungwa yakakosha zvikuru. Fungidzira uchiedza kupukuta jade inokosha nemurwi wematombo akasiyana-siyana. Matombo makuru aizosiya makomba akadzika, nepo madiki angave madiki zvakanyanya kuti ashande paari. Mumaitiro eCMP (Chemical Mechanical Polishing), izvi hazvigamuchirwi zvachose. Upfu hwebrown hwakasanganiswa hwealumina hunoshandiswa muma semiconductors hunofanira kunge huine saizi diki kwazvo yezvidimbu. Izvi zvinoreva kuti zvidimbu zvese zvinenge zvakaenzana. Izvi zvinoita kuti zviuru zvezvidimbu zveupfu hwe micropowder zvifambe pamwe chete pamusoro pewafer, zvichishandisa kumanikidza kwakaenzana kugadzira nzvimbo isina chainopomerwa, kwete ine pockmark. Kunyatsojeka uku kuri padanho re nanometer.
Chechitatu, imushonga "wakavimbika" wemakemikari. Kugadzira machipisi kunoshandisa makemikari akasiyana-siyana, kusanganisira nharaunda dzine acidic nealkaline. Upfu hwebrown fused alumina micropowder hwakagadzikana zvakanyanya mumakemikari uye hahuna kugadzikana nyore nyore nezvimwe zvinhu zviri mumvura inopukuta, zvichidzivirira kupinda kwetsvina itsva. Zvakafanana nemushandi anoshanda nesimba, asingazvikudzi—rudzi rwemunhu anodiwa nevakuru (mainjiniya).
Chechina, chimiro chayo chinogona kudzorwa, zvichiburitsa zvidimbu "zvakapfava". Upfu hwe alumina hwakasanganiswa nebrown hwakakura hunogona kutodzora "chimiro" (kana "chimiro") chezvidimbu. Kuburikidza nenzira yakakosha, zvidimbu zvine mipendero yakapinza zvinogona kushandurwa kuita maumbirwo akakombama kana kuti ane mativi maviri. Izvi zvidimbu "zvakapfava" zvinobudirira zvinoderedza "kukwenya" pamusoro pewafer panguva yekucheka, zvichideredza zvakanyanya njodzi yekukwenya.
III. Kushandiswa Kwechokwadi: "Mujaho Wakanyarara" paCMP Production Line
Pamutsetse wekugadzira weCMP, mawafers anobatirirwa zvakasimba munzvimbo yawo ne vacuum chucks, pamusoro pevhu, odzvanyirirwa pa rounding polishing pad. Polishing fluid ine brown fused alumina micropowder inogara ichipfapfaidzwa, semhute diki, pakati pe polishing pad ne wafer.
Panguva ino, "kumhanya kwakarurama" munyika ine microscopic kunotanga. Mabhiriyoni ezvidimbu zve brown fused alumina micropowder, pasi pekumanikidzwa uye kutenderera, anoita mamiriyoni ekucheka kwe nanometer-level pasekondi imwe chete pamusoro pe wafer. Anofanira kufamba pamwe chete, seuto rakadzidziswa, achifambira mberi zvakanaka, "achibata" nzvimbo dzakakwirira uye "achisiya nzvimbo dzakaderera dzisina chinhu".
Maitiro ese anofanira kunge akapfava semhepo yechirimo, kwete dutu guru. Simba rakawandisa rinogona kukwenya kana kukonzera mitswe midiki (inonzi "kukuvadzwa kwepasi pevhu"); simba risina kukwana rinotungamira mukushanda kushoma uye kukanganisa hurongwa hwekugadzira. Nokudaro, kudzora kwakaringana huwandu, saizi yezvikamu, uye chimiro che brown fused alumina micropowder zvinosarudza zvakananga goho rekupedzisira remachipisi uye mashandiro.
Kubva pakukwesha kwepakutanga kwema silicon wafers, kusvika pakukwesha kwechikamu chimwe nechimwe che insulating layer (silicon dioxide), uye pakupedzisira kusvika pakukwesha ma tungsten plugs ne copper wires zvinoshandiswa pakubatanidza ma circuits, brown fused alumina micropowder inokosha muchikamu chese chakakosha che planarization. Inopinda mumaitiro ese ekugadzira ma chips, zvechokwadi "gamba rekuseri kwezviitiko."
IV. Matambudziko Neramangwana: Hapana chakanakisa, chiri nani chete
Ehe, nzira iyi haina magumo. Sezvo maitiro ekugadzira machipisi achifambira mberi kubva pa7nm ne5nm kusvika pa3nm uye kunyange saizi diki, zvinodiwa zvemaitiro eCMP zvasvika padanho "rakanyanya". Izvi zvinopa matambudziko makuru kune brown fused alumina micropowder:
Yakanaka uye yakafanana zvakanyanya:Upfu hwema micropuds hwemangwanazvingada kusvika pamakumi e nanometer scale, nekugoverwa kwehukuru hwetimbumburu kwakafanana sekunge kwakasefewa nelaser.
Kuchenesa: Chero tsvina yesimbi inouraya, zvichiita kuti pave nekuchena kwakanyanya.
Kushanda: "Mapundu madiki ehupfu" achabuda mune ramangwana here? Semuenzaniso, nepamusoro pakagadziridzwa zvakanyanya, anogona kushandura hunhu hwekucheka pasi pemamiriro ezvinhu chaiwo, kana kuwana kuzvirodza, kuzvizora, kana mamwe mabasa?
Saka, pasinei nekwakatangira muindasitiri yechinyakare yekukwesha, brown fused alumina micropowder yashanduka zvinoshamisa kana yapinda mumunda wepamusoro we semiconductors. Haisisiri "nyundo," asi "nanosurgical scalpel." Nzvimbo yakapfava ye core chip mumidziyo yese yemagetsi yatinoshandisa inowanikwa nekuda kwezvidimbu zvidiki zvisingaverengeki.
Iri ipurojekiti huru yakaitwa munyika isingagoni kunzwisiswa nemaziso, uyeupfu hwebrown hwakasanganiswa hwealumina micropowderHapana mubvunzo kuti inyanzvi yepamusoro yakanyarara asi isingakoshi muchirongwa ichi.